The CT-BW point-of-use abatement is a highly efficient system used in CVD and etching applications for photovoltaic, semiconductor and related industries. As new process tools and technologies with highly corrosive gases and increasing gas loads are introduced, further improvements in abatement technologies are needed. The CT-BW meets those requirements and is in compliance with international safety standards. furthermore it provides a couple of advantages such as a high destruction removal efficiency for all waste gases from CVD and etching processes, especially for PFCs as well as all kinds of solid and gaseous reaction by-products. The system was designed for a reliable, resource- conserving performance even under harsh process conditions. The separation of the functional units such as burner, combustion chamber, wet scrubber, waste gas inlet and cooling system allows a flexible setup for each application. The customized abatement configuration is key to keep the maintenance interval as long as possible and to maximize the uptime.

• Total waste gas load of up to 500 slm per module
• Efficient treatment of deposition & etch gases
• Improved particle reduction
• Monitored emergency bypass dilution
• Increased reactor volume for greater DRE

Features & benefits

• Destruction and removal efficiency (DRE) of up to 99.99 %
• Modularity
  
  - One electrical cabinet for up to four individual modules
  - Cabinets are isolated from each other
  - Each module has its own independent safety chain
    (sensors, probes, etc.)